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"Nano Precision Noncontact Probing System Using Tungsten Ball Tip for High ..."

Peng Xu et al. (2024)

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DOI: 10.1109/TIM.2023.3343805

access: closed

type: Journal Article

metadata version: 2024-01-26

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Peng Xu, Rui-Jun Li, Yi Shen, Rong-Wei Lin, Pan Yao, Zhenying Cheng, Liansheng Zhang, Qiang-Xian Huang, Fang Cheng:
Nano Precision Noncontact Probing System Using Tungsten Ball Tip for High Aspect Ratio Structures With Horizontal Internal Dimensions Below 100 μm. IEEE Trans. Instrum. Meas. 73: 1-10 (2024)

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