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"A dual-mode built-in self-test technique for capacitive MEMS devices."

Xingguo Xiong, Yu-Liang Wu, Wen-Ben Jone (2005)

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DOI: 10.1109/TIM.2005.855094

access: closed

type: Journal Article

metadata version: 2020-06-08

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Xingguo Xiong, Yu-Liang Wu, Wen-Ben Jone:
A dual-mode built-in self-test technique for capacitive MEMS devices. IEEE Trans. Instrum. Meas. 54(5): 1739-1750 (2005)

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