"Design and Control of a Novel 3-D Piezoelectric Scanning Coaxial Optical ..."

Jim-Wei Wu, Shao-An Chao, Ting-Kuei Hsu (2023)

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DOI: 10.1109/TIM.2023.3253879

access: closed

type: Journal Article

metadata version: 2023-04-29

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Jim-Wei Wu, Shao-An Chao, Ting-Kuei Hsu:
Design and Control of a Novel 3-D Piezoelectric Scanning Coaxial Optical Microscope System. IEEE Trans. Instrum. Meas. 72: 1-11 (2023)

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