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"IC fabrication-compatible processing for instrumentation and measurement ..."

Davey D. L. Wijngaards, Reinoud F. Wolffenbuttel (2001)

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DOI: 10.1109/19.982931

access: closed

type: Journal Article

metadata version: 2020-10-26

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Davey D. L. Wijngaards, Reinoud F. Wolffenbuttel:
IC fabrication-compatible processing for instrumentation and measurement applications. IEEE Trans. Instrum. Meas. 50(6): 1475-1484 (2001)

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