"Homogeneity Characterization of Lattice Spacing of Silicon Single Crystals."

Atsushi Waseda et al. (2015)

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DOI: 10.1109/TIM.2014.2383091

access: closed

type: Journal Article

metadata version: 2024-10-06

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Atsushi Waseda, Hiroyuki Fujimoto, Xiao-Wei Zhang, Naoki Kuramoto, Kenichi Fujii:
Homogeneity Characterization of Lattice Spacing of Silicon Single Crystals. IEEE Trans. Instrum. Meas. 64(6): 1692-1695 (2015)

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