"Nanometer-Resolution 4-Probe Laser Interferometric Displacement Sensor ..."

Qi Sang et al. (2025)

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DOI: 10.1109/TIM.2025.3551926

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type: Journal Article

metadata version: 2025-05-09

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Qi Sang, Yumei Wen, Jianwu He, Shaoliang Gong, Ping Li, Yixin Ma:
Nanometer-Resolution 4-Probe Laser Interferometric Displacement Sensor Performance Evaluation: Principles and Operations. IEEE Trans. Instrum. Meas. 74: 1-10 (2025)

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