"Micro-Nano Step Height Measurement Using FMCW Self-Mixing Interferometry."

Bin Liu et al. (2025)

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DOI: 10.1109/TIM.2025.3551012

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type: Journal Article

metadata version: 2025-05-09

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Bin Liu, Guizheng Guan, Yuxi Ruan, Yanguang Yu, Jiangtao Xi, Haining Ji, Pinghua Tang:
Micro-Nano Step Height Measurement Using FMCW Self-Mixing Interferometry. IEEE Trans. Instrum. Meas. 74: 1-8 (2025)

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