"Optimized design and process for making a DC voltage reference based on MEMS."

Anu Kärkkäinen et al. (2005)

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DOI: 10.1109/TIM.2004.843097

access: closed

type: Journal Article

metadata version: 2020-06-08

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Anu Kärkkäinen, Shakil A. Awan, Jukka Kyynäräinen, Panu Pekko, Aarne S. Oja, Heikki Seppä:
Optimized design and process for making a DC voltage reference based on MEMS. IEEE Trans. Instrum. Meas. 54(2): 563-566 (2005)

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