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"Data-Driven Virtual Metrology and Retraining Systems for Color Filter ..."

Chih-Hung Jen, Shu-Kai S. Fan, Yu-Yu Lin (2022)

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DOI: 10.1109/TIM.2022.3207807

access: closed

type: Journal Article

metadata version: 2022-10-18

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Chih-Hung Jen, Shu-Kai S. Fan, Yu-Yu Lin:
Data-Driven Virtual Metrology and Retraining Systems for Color Filter Processes of TFT-LCD Manufacturing. IEEE Trans. Instrum. Meas. 71: 1-12 (2022)

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