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"A Data-Driven Variable-Gain Control Strategy for an Ultra-Precision Wafer ..."

Min Li et al. (2015)

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DOI: 10.1109/TII.2015.2470223

access: closed

type: Journal Article

metadata version: 2020-11-04

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  - https://dblp.org/rec/journals/tii/LiZYH15
Min Li, Yu Zhu, Kaiming Yang, Chuxiong Hu:
A Data-Driven Variable-Gain Control Strategy for an Ultra-Precision Wafer Stage With Accelerated Iterative Parameter Tuning. IEEE Trans. Ind. Informatics 11(5): 1179-1189 (2015)

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