"Low-Noise Quality Factor Tuning in Nondegenerate MEMS Gyroscope Without ..."

Yang Zhao et al. (2024)

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DOI: 10.1109/TIE.2023.3277105

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type: Journal Article

metadata version: 2023-11-23

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Yang Zhao, Qin Shi, Guo Ming Xia, An Ping Qiu:
Low-Noise Quality Factor Tuning in Nondegenerate MEMS Gyroscope Without Dedicated Tuning Electrode. IEEE Trans. Ind. Electron. 71(4): 4230-4240 (2024)

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