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"Bidirectional CMOS-MEMS Airflow Sensor With Sub-mW Power Consumption and ..."

Wei Xu et al. (2022)

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DOI: 10.1109/TIE.2021.3066945

access: closed

type: Journal Article

metadata version: 2021-12-25

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Wei Xu, Xiaoyi Wang, Zongqin Ke, Yi-Kuen Lee:
Bidirectional CMOS-MEMS Airflow Sensor With Sub-mW Power Consumption and High Sensitivity. IEEE Trans. Ind. Electron. 69(3): 3183-3192 (2022)

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