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"A Novel Actuator-Internal Micro/Nano Positioning Stage With an Arch-Shape ..."
Fujun Wang et al. (2019)
- Fujun Wang
, Zhichen Huo, Cunman Liang
, Beichao Shi, Yanling Tian, Xingyu Zhao, Dawei Zhang:
A Novel Actuator-Internal Micro/Nano Positioning Stage With an Arch-Shape Bridge-Type Amplifier. IEEE Trans. Ind. Electron. 66(12): 9161-9172 (2019)
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