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"Axial Displacement Measurement of a Single-Crystal Actuator Using ..."
Kee S. Moon et al. (2005)
- Kee S. Moon, Miguel Levy, Yong K. Hong, Heung K. Park:
Axial Displacement Measurement of a Single-Crystal Actuator Using Phase-Shift Interferometry. IEEE Trans. Ind. Electron. 52(4): 953-959 (2005)
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