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"An Integrated Model-Data-Based Zero-Phase Error Tracking Feedforward ..."

Min Li et al. (2017)

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DOI: 10.1109/TIE.2016.2562606

access: closed

type: Journal Article

metadata version: 2020-11-04

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  - https://dblp.org/rec/journals/tie/LiZYHM17
Min Li, Yu Zhu, Kaiming Yang, Chuxiong Hu, Haihua Mu:
An Integrated Model-Data-Based Zero-Phase Error Tracking Feedforward Control Strategy With Application to an Ultraprecision Wafer Stage. IEEE Trans. Ind. Electron. 64(5): 4139-4149 (2017)

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