"Robust Precision Position Detection With an Optical MEMS Hybrid Device."

Wilfried Hortschitz et al. (2012)

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DOI: 10.1109/TIE.2011.2173096

access: closed

type: Journal Article

metadata version: 2020-06-15

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Wilfried Hortschitz, Harald Steiner, Matthias Sachse, Michael Stifter, Franz Kohl, Johannes Schalko, Artur Jachimowicz, Franz Keplinger, Thilo Sauter:
Robust Precision Position Detection With an Optical MEMS Hybrid Device. IEEE Trans. Ind. Electron. 59(12): 4855-4862 (2012)

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