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"Neural-Network-Based Sensor Fusion of Optical Emission and Mass ..."

Sang Jeen Hong, Gary S. May (2005)

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DOI: 10.1109/TIE.2005.851663

access: closed

type: Journal Article

metadata version: 2020-05-22

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Sang Jeen Hong, Gary S. May:
Neural-Network-Based Sensor Fusion of Optical Emission and Mass Spectroscopy Data for Real-Time Fault Detection in Reactive Ion Etching. IEEE Trans. Ind. Electron. 52(4): 1063-1072 (2005)

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