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"A Flip-Chip Alignment System With the Property of Deviation ..."

Sifeng He et al. (2021)

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DOI: 10.1109/TIE.2020.2973882

access: closed

type: Journal Article

metadata version: 2023-09-30

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  - https://dblp.org/rec/journals/tie/HeTZCWZGCC21
Sifeng He, Hui Tang, Kaifu Zhang, Chuangbin Chen, Jianglin Wang, Zhongyuan Zhu, Jian Gao, Chengqiang Cui, Xin Chen:
A Flip-Chip Alignment System With the Property of Deviation Self-Correction at the Nanoscale. IEEE Trans. Ind. Electron. 68(3): 2345-2355 (2021)

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