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"A High-Resolution MEMS Capacitive Force Sensor With Bionic Swallow Comb ..."
Wendi Gao et al. (2023)
- Wendi Gao, Cunlang Liu, Xiangguang Han, Libo Zhao, Qijing Lin, Zhuangde Jiang, Dong Sun:
A High-Resolution MEMS Capacitive Force Sensor With Bionic Swallow Comb Arrays for Ultralow Multiphysics Measurement. IEEE Trans. Ind. Electron. 70(7): 7467-7477 (2023)
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