"A High-Resolution MEMS Capacitive Force Sensor With Bionic Swallow Comb ..."

Wendi Gao et al. (2023)

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DOI: 10.1109/TIE.2022.3203756

access: closed

type: Journal Article

metadata version: 2023-11-10

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Wendi Gao, Cunlang Liu, Xiangguang Han, Libo Zhao, Qijing Lin, Zhuangde Jiang, Dong Sun:
A High-Resolution MEMS Capacitive Force Sensor With Bionic Swallow Comb Arrays for Ultralow Multiphysics Measurement. IEEE Trans. Ind. Electron. 70(7): 7467-7477 (2023)

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