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"A New Design of a Submicropositioner Utilizing Electromagnetic Actuators ..."

Mei-Yung Chen, Hsuan-Han Huang, Shao-Kang Hung (2010)

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DOI: 10.1109/TIE.2009.2033091

access: closed

type: Journal Article

metadata version: 2022-04-09

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Mei-Yung Chen, Hsuan-Han Huang, Shao-Kang Hung:
A New Design of a Submicropositioner Utilizing Electromagnetic Actuators and Flexure Mechanism. IEEE Trans. Ind. Electron. 57(1): 96-106 (2010)

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