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"Constrained Iterative Feedback Tuning for Robust Control of a Wafer Stage ..."
Marcel François Heertjes, Bart Van der Velden, Tom Oomen (2016)
- Marcel François Heertjes, Bart Van der Velden, Tom Oomen:
Constrained Iterative Feedback Tuning for Robust Control of a Wafer Stage System. IEEE Trans. Control. Syst. Technol. 24(1): 56-66 (2016)
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