"A 0.13-µm CMOS Interface Circuit for a MEMS Resonator-Based Vacuum ..."

Mohammad Ali Taghvaei et al. (2013)

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DOI: 10.1109/TCSI.2013.2265976

access: closed

type: Journal Article

metadata version: 2022-08-10

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Mohammad Ali Taghvaei, Paul-Vahé Cicek, Karim Allidina, Frederic Nabki, Mourad N. El-Gamal:
A 0.13-µm CMOS Interface Circuit for a MEMS Resonator-Based Vacuum Measurement System. IEEE Trans. Circuits Syst. I Regul. Pap. 60-I(12): 3136-3144 (2013)

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