"RuleLearner: OPC Rule Extraction From Inverse Lithography Technique Engine."

Ziyang Yu et al. (2025)

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DOI: 10.1109/TCAD.2024.3499909

access: closed

type: Journal Article

metadata version: 2025-06-04

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Ziyang Yu, Su Zheng, Wenqian Zhao, Shuo Yin, Xiaoxiao Liang, Guojin Chen, Yuzhe Ma, Bei Yu, Martin D. F. Wong:
RuleLearner: OPC Rule Extraction From Inverse Lithography Technique Engine. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 44(5): 1915-1927 (2025)

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