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"A Polynomial Time Exact Algorithm for Overlay-Resistant Self-Aligned ..."

Zigang Xiao et al. (2013)

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DOI: 10.1109/TCAD.2013.2252054

access: closed

type: Journal Article

metadata version: 2022-10-02

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  - https://dblp.org/rec/journals/tcad/XiaoDZW13
Zigang Xiao, Yuelin Du, Hongbo Zhang, Martin D. F. Wong:
A Polynomial Time Exact Algorithm for Overlay-Resistant Self-Aligned Double Patterning (SADP) Layout Decomposition. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 32(8): 1228-1239 (2013)

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