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"Ballistic deposition simulation of via metallization using a ..."

Tom J. Smy, R. Niall Tait, Michael J. Brett (1991)

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DOI: 10.1109/43.62798

access: closed

type: Journal Article

metadata version: 2021-01-11

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Tom J. Smy, R. Niall Tait, Michael J. Brett:
Ballistic deposition simulation of via metallization using a quasi-three-dimensional model. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 10(1): 130-135 (1991)

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