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"Finite-Element Simulation of Local Oxidation of Silicon."

A. Poncet (1985)

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DOI: 10.1109/TCAD.1985.1270097

access: closed

type: Journal Article

metadata version: 2020-09-24

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A. Poncet:
Finite-Element Simulation of Local Oxidation of Silicon. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 4(1): 41-53 (1985)

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