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"A Composite Two-Dimensional Process/Device Simulation System (TOPMODE) and ..."

Shinji Onga et al. (1986)

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DOI: 10.1109/TCAD.1986.1270205

access: closed

type: Journal Article

metadata version: 2020-09-24

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  - https://dblp.org/rec/journals/tcad/OngaKOKD86
Shinji Onga, Masami Konaka, Akemi Ohmichi, Kohichi Kanaka, Ryo Dang:
A Composite Two-Dimensional Process/Device Simulation System (TOPMODE) and its Application for Total Process Designing in Submicron VLSI MOS Device Phase. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 5(3): 365-370 (1986)

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