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"A novel geometric resizing technique for data conversion from CAD data to ..."

Tsuneo Okubo et al. (1992)

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DOI: 10.1109/43.159996

access: closed

type: Journal Article

metadata version: 2020-09-24

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Tsuneo Okubo, Takashi Watanabe, Kou Wada, Kazuyuki Saito:
A novel geometric resizing technique for data conversion from CAD data to electron beam exposure data. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 11(9): 1104-1113 (1992)

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