"E-Beam Lithography Character and Stencil Co-Optimization."

Wai-Kei Mak, Chris Chu (2014)

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DOI: 10.1109/TCAD.2013.2296496

access: closed

type: Journal Article

metadata version: 2020-09-24

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Wai-Kei Mak, Chris Chu:
E-Beam Lithography Character and Stencil Co-Optimization. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 33(5): 741-751 (2014)

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