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"Verification of analytic point defect models using SUPREM-IV [dopant ..."

Mark E. Law, Robert W. Dutton (1988)

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DOI: 10.1109/43.3148

access: closed

type: Journal Article

metadata version: 2020-09-24

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  - journals/tcad/LawD88
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Mark E. Law, Robert W. Dutton:
Verification of analytic point defect models using SUPREM-IV [dopant diffusion]. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 7(2): 181-190 (1988)

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