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"Manufacturability Enhancement With Dummy via Insertion for DSA-MP ..."

Yun-Jhe Jiang, Kuo-Hao Wu, Shao-Yun Fang (2021)

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DOI: 10.1109/TCAD.2020.2999922

access: closed

type: Journal Article

metadata version: 2021-03-23

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Yun-Jhe Jiang, Kuo-Hao Wu, Shao-Yun Fang:
Manufacturability Enhancement With Dummy via Insertion for DSA-MP Lithography Using Multiple BCP Materials. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 40(2): 400-404 (2021)

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