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"Two-dimensional modeling of ion implantation induced point defects."

Gerhard Hobler, Siegfried Selberherr (1988)

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DOI: 10.1109/43.3147

access: closed

type: Journal Article

metadata version: 2020-09-24

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  - journals/tcad/HoblerS88
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  - https://dblp.org/rec/journals/tcad/HoblerS88
Gerhard Hobler, Siegfried Selberherr:
Two-dimensional modeling of ion implantation induced point defects. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 7(2): 174-180 (1988)

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