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"Massively parallel algorithms for scattering in optical lithography."

Roberto Guerrieri et al. (1991)

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DOI: 10.1109/43.85755

access: closed

type: Journal Article

metadata version: 2020-09-24

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  - https://dblp.org/rec/journals/tcad/GuerrieriTGN91
Roberto Guerrieri, Karim H. Tadros, John K. Gamelin, Andrew R. Neureuther:
Massively parallel algorithms for scattering in optical lithography. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 10(9): 1091-1100 (1991)

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