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"Simulation of microcrack effects in dissolution of positive resist exposed ..."
Roberto Guerrieri, Andrew R. Neureuther (1988)
- Roberto Guerrieri, Andrew R. Neureuther:
Simulation of microcrack effects in dissolution of positive resist exposed by X-ray lithography. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 7(7): 755-764 (1988)
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