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"Modeling, Analysis and Control of Dual-Arm Cluster Tools With Residency ..."
Naiqi Wu, MengChu Zhou (2012)
- Naiqi Wu, MengChu Zhou:

Modeling, Analysis and Control of Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation Based on Petri Nets. IEEE Trans Autom. Sci. Eng. 9(2): 446-454 (2012)

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