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"Adaptive Neuro-Fuzzy Inference System Modeling of MRR and WIWNU in CMP ..."
Lih Wen-Chen et al. (2008)
- Lih Wen-Chen, Satish T. S. Bukkapatnam
, Prahalad K. Rao
, Naga Chandrasekharan, Ranga Komanduri:
Adaptive Neuro-Fuzzy Inference System Modeling of MRR and WIWNU in CMP Process With Sparse Experimental Data. IEEE Trans Autom. Sci. Eng. 5(1): 71-83 (2008)
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