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"Adaptive Scheduling of Cluster Tools With Wafer Delay Constraints and ..."

Yuchul Lim, Tae-Sun Yu, Tae-Eog Lee (2020)

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DOI: 10.1109/TASE.2019.2930046

access: closed

type: Journal Article

metadata version: 2020-04-02

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  - https://dblp.org/rec/journals/tase/LimYL20
Yuchul Lim, Tae-Sun Yu, Tae-Eog Lee:
Adaptive Scheduling of Cluster Tools With Wafer Delay Constraints and Process Time Variation. IEEE Trans Autom. Sci. Eng. 17(1): 375-388 (2020)

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