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"A New Class of Sequences Without Interferences for Cluster Tools With ..."

Yuchul Lim, Tae-Sun Yu, Tae-Eog Lee (2019)

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DOI: 10.1109/TASE.2018.2815157

access: closed

type: Journal Article

metadata version: 2020-04-02

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  - https://dblp.org/rec/journals/tase/LimYL19
Yuchul Lim, Tae-Sun Yu, Tae-Eog Lee:
A New Class of Sequences Without Interferences for Cluster Tools With Tight Wafer Delay Constraints. IEEE Trans Autom. Sci. Eng. 16(1): 392-405 (2019)

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