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"A Compliant Parallel XY Micromotion Stage With Complete Kinematic Decoupling."

Yangmin Li, Jiming Huang, Hui Tang (2012)

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DOI: 10.1109/TASE.2012.2198466

access: closed

type: Journal Article

metadata version: 2020-06-10

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Yangmin Li, Jiming Huang, Hui Tang:
A Compliant Parallel XY Micromotion Stage With Complete Kinematic Decoupling. IEEE Trans Autom. Sci. Eng. 9(3): 538-553 (2012)

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