"Economic Efficiency Analysis of Wafer Fabrication."

Robert C. Leachman, Shengwei Ding, Chen-Fu Chien (2007)

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DOI: 10.1109/TASE.2007.906142

access: closed

type: Journal Article

metadata version: 2022-10-04

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Robert C. Leachman, Shengwei Ding, Chen-Fu Chien:
Economic Efficiency Analysis of Wafer Fabrication. IEEE Trans Autom. Sci. Eng. 4(4): 501-512 (2007)

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