"Optimal Scheduling of Multicluster Tools With Constant Robot Moving Times, ..."

Wai Kin (Victor) Chan et al. (2011)

Details and statistics

DOI: 10.1109/TASE.2010.2046893

access: closed

type: Journal Article

metadata version: 2020-04-02

a service of  Schloss Dagstuhl - Leibniz Center for Informatics