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"Kinodynamic Generation of Wafer Scanners Trajectories Used in ..."
Yazan Mohammad Al-Rawashdeh, Mohammad Al Janaideh, Marcel François Heertjes (2023)
- Yazan Mohammad Al-Rawashdeh
, Mohammad Al Janaideh
, Marcel François Heertjes:
Kinodynamic Generation of Wafer Scanners Trajectories Used in Semiconductor Manufacturing. IEEE Trans Autom. Sci. Eng. 20(1): 718-732 (2023)
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