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"Gas-damped double-gimbaled electrostatic torsional micromirror modeling ..."

Ivan Plander, Michal Stepanovsky (2012)

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DOI: 10.1016/J.SIMPAT.2011.08.010

access: closed

type: Journal Article

metadata version: 2021-04-09

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Ivan Plander, Michal Stepanovsky:
Gas-damped double-gimbaled electrostatic torsional micromirror modeling and simulation. Simul. Model. Pract. Theory 20(1): 59-69 (2012)

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