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"A Robust Computational Algorithm for Inverse Photomask Synthesis in ..."
Siu-Kai Choy et al. (2012)
- Siu-Kai Choy, Ningning Jia, Chong-Sze Tong, Man-Lai Tang
, Edmund Y. Lam
:
A Robust Computational Algorithm for Inverse Photomask Synthesis in Optical Projection Lithography. SIAM J. Imaging Sci. 5(2): 625-651 (2012)
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