"Six Degrees of Freedom Displacement Measurement System for Wafer Stage ..."

Bo Zhao et al. (2018)

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DOI: 10.3390/S18072030

access: open

type: Journal Article

metadata version: 2025-03-03

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Bo Zhao, Weijia Shi, Jiawei Zhang, Ming Zhang, Xue Qi, Jiaxin Li, Feng Li, Jiubin Tan:
Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors. Sensors 18(7): 2030 (2018)

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