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"Modelling and Design of MEMS Piezoresistive Out-of-Plane Shear and Normal ..."

Yi Zhang, Lin Li (2018)

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DOI: 10.3390/S18113737

access: open

type: Journal Article

metadata version: 2022-10-02

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Yi Zhang, Lin Li:
Modelling and Design of MEMS Piezoresistive Out-of-Plane Shear and Normal Stress Sensors. Sensors 18(11): 3737 (2018)

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