"Challenges in the Assembly and Handling of Thin Film Capped MEMS Devices."

Jeroen J. M. Zaal, Willem D. van Driel, G. Q. Zhang (2010)

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DOI: 10.3390/S100403989

access: open

type: Journal Article

metadata version: 2018-11-14

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Jeroen J. M. Zaal, Willem D. van Driel, G. Q. Zhang:
Challenges in the Assembly and Handling of Thin Film Capped MEMS Devices. Sensors 10(4): 3989-4001 (2010)

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