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"Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for ..."

Hong Goo Yeo et al. (2020)

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DOI: 10.3390/S20010315

access: open

type: Journal Article

metadata version: 2020-05-30

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  - journals/sensors/YeoJSJC20
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Hong Goo Yeo, Joontaek Jung, Minkyung Sim, Jae Eun Jang, Hongsoo Choi:
Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array. Sensors 20(1): 315 (2020)

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