"Manufacture and Characterization of High Q-Factor Inductors Based on ..."

Ming-Zhi Yang, Ching-Liang Dai, Jin-Yu Hong (2011)

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DOI: 10.3390/S111009798

access: open

type: Journal Article

metadata version: 2022-10-02

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Ming-Zhi Yang, Ching-Liang Dai, Jin-Yu Hong:
Manufacture and Characterization of High Q-Factor Inductors Based on CMOS-MEMS Techniques. Sensors 11(10): 9798-9806 (2011)

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