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"A Novel High-Q Dual-Mass MEMS Tuning Fork Gyroscope Based on 3D ..."
Pengfei Xu et al. (2021)
- Pengfei Xu
, Chaowei Si, Yurong He, Zhenyu Wei, Lu Jia, Guowei Han, Jin Ning, Fuhua Yang:
A Novel High-Q Dual-Mass MEMS Tuning Fork Gyroscope Based on 3D Wafer-Level Packaging. Sensors 21(19): 6428 (2021)
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